MKS

MKS

By: Mks Instruments, Inc.

Sensors, Gauges, Meters For Measurement And Control Of Fluid Pressure, Vacuum And Gas Flow; Residual Gas Analyzers; Monitors For Detecting Gas Compositions Within A Process Chamber; Mass Spectrometers; Electrical Analog-digital Interface Adapters; Computer Hardware Used For Measurement And Control Of Fluid Pressure Vacuum And Gas Flow; Radio Frequency, Direct Current And Microwave Power Supplies And Generators; Power Generators For Converting Energy From Chemical Gas Reactions; Gas And Fluid Pressure Valves, Flanges And Fittings For Controlling, Containing, Isolating And Shutting Off Gas And Fluid Flow; Gas Sticks Composed Of Mass Flow Controllers, Pressure Transducers, Control Valves, Isolation Valves And Volumes; Gas Filters And Purifiers; Heaters; Helium Leak Detectors; Gas Detectors And Analyzers; Calibration Equipment For Monitoring And Adjusting Gas And Fluid Pressure And Flow; Traps For Capturing Waste Materials Exiting From A Process Chamber; Liquid Delivery System Composed Primarily Of Vaporizer, And Controller For Vaporizing A Liquid Into A Gas And Delivering The Gas To A Process Chamber; Computer Hardware And Software For Measuring The Transmission, Reflectivity, Optical Density And Thickness Of Thin Metal Films, And For Providing Topographical Images Of The Same; Software For Operating Optical Spectrometers; Software For Operating Mass Spectrometers; Computer Hardware And Software For Determining The Presence And Measurement Of Residual Contaminants; Microprocessor Based Data Communication Devices For Communicating Between Quadra Pole Gas Or Fluid Mass Analyzers For And A Computer; Devices Used To Generate Radio Waves And Microwave Plasma: Reactive Gas Generators Including Remote Plasma Sources And Ozone Generators; Controllers, Computer Hardware And Software For Use In Monitoring And Controlling Fluid, Vacuum And Gas Generation, Flow, Detection Analysis, And Delivery Devices; Radio Frequency Amplifiers And Radio Frequency Power Generators; Dc Power Generators.